Bulk Chemical Distribution Systems
Our bulk chemical distribution systems allow customers to supply chemicals from an easily accessible point across distances and elevations to multiple points of use within their facilities.

Slurry Distribution Systems
Mega Fluid Systems selection of tote and drum stations provide our customers with the ability to distribute a wide range of slurries from one location to another over a variety of distances and elevations without damaging the slurry or compromising its characteristics.

Our customers realize significant savings from the ability to load and store slurries in the subfab away from the blend and distribution point, which typically occupies a larger and more expensive footprint.

Slurry Blending + Distribution Systems
Our bulk blending and distribution systems combine the dual capabilities of blending multiple slurry and chemical constituents along with deionized water and then distributing the blended slurry and deionized water to multiple points of use on a circulated or distributed loop system.

Metrology
To help customers understand the changes that occur to slurries during handling, we offer analysis of density, pH, flow, mass, particle distribution and size.

Our systems reflect a deep understanding of the primary slurry groups, such as silica oxide, alumina, and Ceria-based slurries. We also offer a complete line of chemical blend and suspense systems for post-etch and post-CMP clean applications.

Mega provides a variety of cost-competitive bulk blending and distribution, point-of-use, and metrology solutions which integrate multiple capabilities. Employing a flexible, modular architecture supports a wide range of make-up and consumption rates. This enables custom solutions to meet unique process requirements.

For information, please visit www.megafluidsystems.com